%0 Journal Article
%J Microsystem Technologies
%D 2004
%T Assembly of hybrid micro-systems -– the SFB 440
%A U. Dilthey
%A A. Brandenburg
%A G. Smolka
%I Springer-Verlag
%P 247–251
%R 10.1007/s00542-003-0366-z
%V 10