%0 Journal Article %J Microsystem Technologies %D 2004 %T Micro electron beam welding and laser machining -– potentials of beam welding methods in the micro-system technology %A G. Smolka %A A. Gillner %A L. Bosse %A R. Lützeler %I Springer-Verlag %P 187–192 %R DOI 10.1007/s00542-003-0347-2 %V 10