@conference {DupakL_EBT_2009, title = {Planar Heating Element Adjusted by Electron Beam Micromachining}, booktitle = {Proceedings of the 9th International Conference on Electron Beam Technologies}, year = {2009}, pages = {82{\textendash}84}, publisher = {Bulgarian Academy of Sciencies}, organization = {Bulgarian Academy of Sciencies}, address = {Varna}, issn = {0861-4717}, author = {Dupak, L. and Dup{\'a}k, Jan}, editor = {Georgy Mladenov} }