Assembly of hybrid micro-systems -– the SFB 440

TitleAssembly of hybrid micro-systems -– the SFB 440
Publication TypeJournal Article
Year of Publication2004
AuthorsDilthey, U. - Brandenburg, A. - Smolka, G.
JournalMicrosystem Technologies
Volume10
Pagination247–251
ISSN1432-1858
DOI10.1007/s00542-003-0366-z