Title | Assembly of hybrid micro-systems -– the SFB 440 |
Publication Type | Journal Article |
Year of Publication | 2004 |
Authors | Dilthey, U. - Brandenburg, A. - Smolka, G. |
Journal | Microsystem Technologies |
Volume | 10 |
Pagination | 247–251 |
ISSN | 1432-1858 |
DOI | 10.1007/s00542-003-0366-z |