Nadpis | Micro electron beam welding and laser machining -– potentials of beam welding methods in the micro-system technology |
Publication Type | Journal Article |
Year of Publication | 2004 |
Authors | Smolka, G. - Gillner, A. - Bosse, L. - Lützeler, R. |
Journal | Microsystem Technologies |
Volume | 10 |
Pagination | 187–192 |
ISSN | 1432-1858 |
DOI | DOI 10.1007/s00542-003-0347-2 |