%0 Conference Paper
%B Proceedings of the 8th International Conference on Electron Beam Technologies
%D 2006
%T The Application of Monte-Carlo Methods to Electron-Beam Interactions with Solids for the Prediction of Micromachining Capabilities
%A Kathrin Voges
%A Tim Welters
%A S. Böhm
%A Klaus Dilger
%E Georgy Mladenov
%C Varna
%I Bulgarian Academy of Sciencies
%P 46–50