%0 Conference Paper %B Proceedings of the 8th International Conference on Electron Beam Technologies %D 2006 %T The Application of Monte-Carlo Methods to Electron-Beam Interactions with Solids for the Prediction of Micromachining Capabilities %A Kathrin Voges %A Tim Welters %A S. Böhm %A Klaus Dilger %E Georgy Mladenov %C Varna %I Bulgarian Academy of Sciencies %P 46–50