@article {Dilthey_MT_2004, title = {Assembly of hybrid micro-systems -{\textendash} the SFB 440}, journal = {Microsystem Technologies}, volume = {10}, year = {2004}, pages = {247{\textendash}251}, publisher = {Springer-Verlag}, issn = {1432-1858}, doi = {10.1007/s00542-003-0366-z}, author = {U. Dilthey and A. Brandenburg and G. Smolka} }