@article {Smolka_MT_2004,
	title = {Micro electron beam welding and laser machining -{\textendash} potentials of beam welding methods in the micro-system technology},
	journal = {Microsystem Technologies},
	volume = {10},
	year = {2004},
	pages = {187{\textendash}192},
	publisher = {Springer-Verlag},
	issn = {1432-1858},
	doi = {DOI 10.1007/s00542-003-0347-2},
	author = {G. Smolka and A. Gillner and L. Bosse and R. L{\"u}tzeler}
}