@article {Smolka_MT_2004, title = {Micro electron beam welding and laser machining -{\textendash} potentials of beam welding methods in the micro-system technology}, journal = {Microsystem Technologies}, volume = {10}, year = {2004}, pages = {187{\textendash}192}, publisher = {Springer-Verlag}, issn = {1432-1858}, doi = {DOI 10.1007/s00542-003-0347-2}, author = {G. Smolka and A. Gillner and L. Bosse and R. L{\"u}tzeler} }