Nadpis | Electron beam induced current measurement on a specimen based in a cathode lens |
Publication Type | Conference Paper |
Year of Publication | 2009 |
Authors | Horáček, M. - Zobač, M. - Vlček, I. |
Conference Name | MC 2009 - Microscopy Conference: First Joint Meeting ofDreiländertagung and Multinational Conference on Microscopy |
Date Published | 2009 |
Publisher | Verlag der Technischen Universität |
Conference Location | Graz |
ISBN Number | 978-3-85125-062-6 |
Klíčová slova | cathode lens, elektron beam induced current, SEM, specimen bias, very low energy electrons |