Electron beam induced current measurement on a specimen based in a cathode lens

NadpisElectron beam induced current measurement on a specimen based in a cathode lens
Publication TypeConference Paper
Year of Publication2009
AuthorsHoráček, M. - Zobač, M. - Vlček, I.
Conference NameMC 2009 - Microscopy Conference: First Joint Meeting ofDreiländertagung and Multinational Conference on Microscopy
Date Published2009
PublisherVerlag der Technischen Universität
Conference LocationGraz
ISBN Number978-3-85125-062-6
Klíčová slovacathode lens, elektron beam induced current, SEM, specimen bias, very low energy electrons